COOLVAC 1500 iSL-H
| 排気速度 (H₂): | 2500 l/s |
| 排気速度 (H₂O): | 4600 l/s |
| 排気速度 (Ar): | 1200 l/s |
| 排気速度 (N₂): | 1500 l/s |
COOLVAC 1500 iSL-H
Cryogenic Pump with electronics
The iSmartLine (iSL) operates automatically and is equipped with pressure gauge, fore-vacuum valve and electrical heaters.
It has several variants of high vacuum flanges (DN 200 ISO-K, DN 200 CF or 6" ANSI) and is supplied with a DN 25 KF backing flange and a DN 40 KF safety valve at flange. Further flanges are in size DN 16 KF.
The pumping speed for molecular nitrogen (N2) is 1,500 l/s, for hydrogen (H2O) 4,600 l/s; the capacity for molecular nitrogen (N2) 15 bar*l, for molecular hydrogen (H2) 15 bar*l.
For variants with different, optional flange sizes or customized properties please do not hesitate to contact your local sales team or application management team.
COOLVAC i - Cryogenic pumps
Fulfilling the rapidly increasing requirements for cryogenic pump systems.
Guaranteed high quality, high reliability and impressive performance data
The new COOLVAC i serie, with its new smart family of cryogenic pumps is perfectly adapted to both current and future economic trends and cycles.
We have combined the new compact COOL.DRIVE i controller which is easy to operate with the high performance, low vibration and energy efficient cold heads and compressors of the respective i series.
Highly effective pumping speed for all gases, water vapor in particular
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Automatic control via COOL.DRIVE i controller
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Boost, Eco or standard operation mode for fast cool down, energy saving or standard operation via communication with compressor (for pumps > 5000 l/s)
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Integrated safety valve according EN 4126
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Simple and rapid maintenance
Depending on the variant, the cryogenic pumps offer different features:
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iBL Basic line pumps without automatic control
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iSL Smart line with automatic control and boost/eco mode
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iLN2 liquid nitrogen cooled shield
COOLVAC 1500 iSL
Specifically developed for coating, Semiconductor adjacent and R&D market applications, this new generation of cryogenic pumps offers high reliability, low cost of ownership and small footprint. Depending on your needs you can easily operate the pump either in vertical or in horizontal position. No matter which orientation, their maintenance is simple.
